Sputtering Targets

AlScN Sputtering Target

Al₁₋ₓScₓN

Custom-composition aluminium scandium nitride targets for piezoelectric, RF and MEMS thin-film research.

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Supply forms

Available configurations

  • Custom scandium content
  • Planar ceramic target
  • Bonded target assembly
  • Research and pilot sizes

RFQ specification

Information to provide

  1. Requested Sc atomic percentage
  2. Purity
  3. Target dimensions
  4. Density requirement
  5. Backing and bonding
  6. Cathode and process information

Applications

Typical use areas

  • Piezoelectric MEMS
  • RF filters
  • Acoustic resonators
  • Sensors
  • Ferroelectric research

Technical definition

Parameters used to define this product.

These are specification fields, not fixed stock values. The offered values are confirmed against your RFQ.

Nominal chemistryAl₁₋ₓScₓN; scandium fraction x defined by the customer
Product classMulticomponent nitride sputtering target
Critical controlsSc atomic %, oxygen/metallic impurities, density and geometry
Process relevanceComposition is selected around piezoelectric, RF or MEMS film development

Order definition

What is confirmed with your quotation.

01

Material specification

Purity, composition, grade, dimensions, tolerances and requested form.

02

Production configuration

Bonding, backing, surface finish, packaging or other product-specific options.

03

Documentation

Analysis documentation and any additional agreed dimensional or assembly records.

04

Commercial supply

Quantity, lead time, DAP or EXW delivery and the applicable quotation validity.

Frequently asked questions

Before requesting a quotation.

Can Adesis supply AlScN Sputtering Target?

Adesis reviews alscn sputtering target requirements against the requested specification, quantity, documentation and delivery destination. Final availability and lead time are confirmed by quotation.

Which specifications are required for a AlScN Sputtering Target quotation?

Please provide requested sc atomic percentage, purity, target dimensions, density requirement, backing and bonding. Additional process or drawing information may be requested where relevant.

Are custom alscn sputtering target configurations available?

Custom configurations are evaluated individually. Available options may include custom scandium content, planar ceramic target, bonded target assembly, research and pilot sizes.

Does Adesis ship alscn sputtering target internationally?

Adesis ships from Türkiye and can evaluate DAP or EXW delivery for international orders, subject to product availability, destination and applicable trade requirements.

Specification notice

Values and forms shown are representative. Adesis confirms the commercially offered specification in the quotation and order documents.

Technical inquiry

Specify your alscn sputtering target requirement.

Send the material, purity, dimensions, quantity and application. We will review the complete specification before quoting.

Start your RFQ