Sputtering Targets

AlScN Sputtering Target

Al₁₋ₓScₓN

Custom-composition aluminium scandium nitride targets for piezoelectric, RF and MEMS thin-film research.

Aluminium scandium nitride target supply

Define the AlScN target before comparing quotations.

AlScN requirements for piezoelectric, RF and MEMS research need more than a material name. Send the exact target specification and the intended deposition process so Adesis can review the requested configuration. Material feasibility, offered composition and delivery time are confirmed individually.

State what the composition describes

Specify whether your inquiry is for a nitrogen-containing AlScN compound target or an Al–Sc metal alloy target for your process. Do not use these descriptions interchangeably. For Sc content, state whether the percentage is relative to Al + Sc or to all elements, and include the permitted tolerance.

Keep target and film requirements separate

List the required target composition separately from any film composition or performance goal. Provide the cathode model, target diameter or length × width, thickness, quantity and any drawing. Film targets or process goals should not be treated as guaranteed properties of the supplied target.

Define the bonded assembly

State whether a backing plate is required, its material and dimensions, and the total assembly thickness. Include any bonding restrictions and the operating information needed to review the requested assembly.

Review backing plates and bonding ↗

Agree acceptance documents

Identify the required composition report, impurity limits, density requirement and dimensional inspection records in the RFQ. Documentation and acceptance criteria must be agreed before an order; no fixed purity, stock or lead time is implied by this page.

Quality and documentation requirements ↗

Request an AlScN target quotation ↗Compare metal, alloy and ceramic sputtering targets ↗

Supply forms

Available configurations

Custom scandium content
Planar ceramic target
Bonded target assembly
Research and pilot sizes

RFQ specification

Information to provide

Requested Sc atomic percentage
Purity
Target dimensions
Density requirement
Backing and bonding
Cathode and process information

Applications

Typical use areas

Piezoelectric MEMS
RF filters
Acoustic resonators
Sensors
Ferroelectric research

Technical definition

Parameters used to define this product.

These are specification fields, not fixed stock values. The offered values are confirmed against your RFQ.

Nominal chemistryAl₁₋ₓScₓN; scandium fraction x defined by the customer

Product classMulticomponent nitride sputtering target

Critical controlsSc atomic %, oxygen/metallic impurities, density and geometry

Process relevanceComposition is selected around piezoelectric, RF or MEMS film development

Order definition

What is confirmed with your quotation.

Material specification

Purity, composition, grade, dimensions, tolerances and requested form.

Production configuration

Bonding, backing, surface finish, packaging or other product-specific options.

Documentation

Analysis documentation and any additional agreed dimensional or assembly records.

Commercial supply

Quantity, lead time, DAP or EXW delivery and the applicable quotation validity.

Frequently asked questions

Before requesting a quotation.

Can Adesis supply AlScN Sputtering Target?

Adesis reviews alscn sputtering target requirements against the requested specification, quantity, documentation and delivery destination. Final availability and lead time are confirmed by quotation.

Which specifications are required for a AlScN Sputtering Target quotation?

Please provide requested sc atomic percentage, purity, target dimensions, density requirement, backing and bonding. Additional process or drawing information may be requested where relevant.

Are custom alscn sputtering target configurations available?

Custom configurations are evaluated individually. Available options may include custom scandium content, planar ceramic target, bonded target assembly, research and pilot sizes.

Does Adesis ship alscn sputtering target internationally?

Adesis ships from Türkiye and can evaluate DAP or EXW delivery for international orders, subject to product availability, destination and applicable trade requirements.

Specification notice

Values and forms shown are representative. Adesis confirms the commercially offered specification in the quotation and order documents.

Technical inquiry

Specify your alscn sputtering target requirement.

Send the material, purity, dimensions, quantity and application. We will review the complete specification before quoting.

Start your RFQ